Project information
Hard and superhard coatings prepared by unconventional plasma processes
- Project Identification
- GV106/96/K245
- Project Period
- 1/1996 - 1/2000
- Investor / Pogramme / Project type
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Czech Science Foundation
- Complex Projects
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
- Cooperating Organization
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Institute of Physics of the ASCR, v. v. i.
- Responsible person Mgr. Martin Mišina, Dr.
- Responsible person doc. RNDr. Milan Hrabovský, CSc.
- Responsible person prof. Ing. Jindřich Musil, DrSc.
The aim of the project is to investigate the mechanism of growth of hard and superhard coatings, such as nitrides of transition metals, 'hard amorphous Si0xNy , Si0xCy , Si0xCyHz and BN coatings, diamond and carbon nitride coatings, and to develop new ge neration of hard nanocomposite coatings composed of hard nanocrystalline phase and amorphous or metallic matrix. The nanocomposite coatings with "hard' matrix will represent a new class of superhard coatings with a high Young modulus. The nanocomposite c oatings with "soft" matrix will represent a new class of hard coatings with higher toughness. To achieve this goal a systematic basic research concentrated on (i) formation of nanocrystalline and amorphous films, (ii) formation of "high temperature" stru ctures at low temperatures of about 100 °C or lower, (iii) investigation of plasmochemical reactions relevant for the forming of the mentioned advanced materials, (iv) intermixing of coating and substrate elements and on (v) adhesion of hard coatings to
Publications
Total number of publications: 32
2001
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Additional microwave diagnostics of afterglow with ESR spectrometer
Microwave discharges: fundamentals and applications, year: 2001, number of pages: 6 s.
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Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy
Surface and Interface Analysis, year: 2001, volume: 32, edition: 1
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Determination of rate constant of N+HMDSZ gas phase chemical reaction by means of EPR
SAPP 13th Symposium Proceedings, year: 2001
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Determination of Thicknesses and Spectral Dependences of Refractive Indices of Non-Absorbing and Weakly Absorbing Thin Films Using the Wavelengths Related to Extrema in Spectral Reflectances
Vacuum, year: 2001, volume: 61, edition: 1
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Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001
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Optical diagnostics of inductively coupled RF discharge
SAPP 13th Symposium Proceedings, year: 2001
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Optical Characterization of Diamond-like Carbon Films
Vacuum, year: 2001, volume: 61, edition: 2-4
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Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances
Applied Optics, year: 2001, volume: 40, edition: 31
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Plasma modification of polycarbonates
Surface & coatings technology, year: 2001, volume: 2001, edition: 142-144
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Study of hydrocarbons decomposition in microwave discharge and mass spectrometry of radiofrequency discharges in liquids
SAPP 13th Symposium Proceedings, year: 2001