Project information
Hard and superhard coatings prepared by unconventional plasma processes
- Project Identification
- GV106/96/K245
- Project Period
- 1/1996 - 1/2000
- Investor / Pogramme / Project type
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Czech Science Foundation
- Complex Projects
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
- Cooperating Organization
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Institute of Physics of the ASCR, v. v. i.
- Responsible person Mgr. Martin Mišina, Dr.
- Responsible person doc. RNDr. Milan Hrabovský, CSc.
- Responsible person prof. Ing. Jindřich Musil, DrSc.
The aim of the project is to investigate the mechanism of growth of hard and superhard coatings, such as nitrides of transition metals, 'hard amorphous Si0xNy , Si0xCy , Si0xCyHz and BN coatings, diamond and carbon nitride coatings, and to develop new ge neration of hard nanocomposite coatings composed of hard nanocrystalline phase and amorphous or metallic matrix. The nanocomposite coatings with "hard' matrix will represent a new class of superhard coatings with a high Young modulus. The nanocomposite c oatings with "soft" matrix will represent a new class of hard coatings with higher toughness. To achieve this goal a systematic basic research concentrated on (i) formation of nanocrystalline and amorphous films, (ii) formation of "high temperature" stru ctures at low temperatures of about 100 °C or lower, (iii) investigation of plasmochemical reactions relevant for the forming of the mentioned advanced materials, (iv) intermixing of coating and substrate elements and on (v) adhesion of hard coatings to
Publications
Total number of publications: 32
2000
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Additional microwave diagnostics of afterglow with ESR spectrometer
Microwave discharges: fundamentals and applications, year: 2000
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Analysis of Slightly Rough Thin Films by Optical Methods and AFM
Mikrochim. Acta, year: 2000, volume: 132, edition: 1
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Analysis of thin films by optical multi-sample methods
Acta Physica Slovaca, year: 2000, volume: 50, edition: 4
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Atomic force microscopy measurements of surface roughness quantities important in optics of surfaces and thin films
Proceedings of the 4th Seminar on Quantitative Microscopy, year: 2000
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Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge
Diamond and Related Materials, year: 2000, volume: 9, edition: 7
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Characterization of CNx/SiOy Films Prepared by the Inductively Coupled RF Discharge
Czechoslovak Journal of Physics, year: 2000, volume: 2000, edition: 50(S3)
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Influence of admixtures on production rate of atomic nitrogen
Czechoslovak Journal of Physics, year: 2000, volume: 50-S3, edition: 50-S3
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Low Pressure Plasma Treatment of Polycarbonate
Electrophysical and Thermophysical Processes in Low-Pressure Plasma, year: 2000
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Matrix formalism for imperfect thin films
Acta physica slovaca, year: 2000, volume: 50, edition: 4
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Optical diagnostics of inductively coupled RF discharge during deposition of nanocomposite CNx/SiOy films
Proceedings of 20th Summer School and International Symposium on the Physics of Ionized Gases, year: 2000