Project information
Research and development and industrializartion of novel super hard nanocrystalline materials
- Project Identification
- ME 367
- Project Period
- 7/2000 - 6/2002
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- Programme KONTAKT (ME+MEB)
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
Development and industrialization of new superhard nanocristalline TiN/AlN/SiN coatings in collaboration with the Institut for Inorganic Materials, Munich, Germany and SHM company will be realized. Department of Physical Electronics will specialize in monitoring of plasma processes running during the deposition of superhard coatings using preferable optical spectroscopy and probe methods. On the base of spectral and probe measurements we develop simple detectors making possible to monitor plasmachemical processes in order to obtain superhard coatings with optimal mechanical properties. Moreover, the microwave experimetal set-up (the ASTEX type) for the depositon od diamond-like coatings, BN type will be arranged at MU. We also develop other deposition device generating plasma with homogenuos radial profile. A new high frequency generator with inductively coupled plasma for the deposition of nanocomposite materials like CN/SiO and CN/SiN will be developed, too.
Publications
Total number of publications: 24
2000
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Influence of admixtures on production rate of atomic nitrogen
Czechoslovak Journal of Physics, year: 2000, volume: 50-S3, edition: 50-S3
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Optical diagnostics of inductively coupled RF discharge during deposition of nanocomposite CNx/SiOy films
Proceedings of 20th Summer School and International Symposium on the Physics of Ionized Gases, year: 2000
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Plasma Pencil - New Small Scale Source for Atmospheric Surface Modification
Czechoslovak Journal of Physics, year: 2000, volume: 50, edition: S3
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Plasmachemical Deposition of Thin Films
4th Czech-Russian Seminar on Electrophysical and Thermophysical Processes in Low-Temperature Plasma, year: 2000