Dielectric response and structure of amorphous hydrogenated carbon films with nitrogen admixture

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Publikace nespadá pod Ekonomicko-správní fakultu, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.
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ZAJÍČKOVÁ Lenka FRANTA Daniel NEČAS David BURŠÍKOVÁ Vilma MURESAN Mihai George PEŘINA Vratislav COBET Christoph

Rok publikování 2011
Druh Článek v odborném periodiku
Časopis / Zdroj Thin Solid Films
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www http://dx.doi.org/10.1016/j.tsf.2011.02.021
Doi http://dx.doi.org/10.1016/j.tsf.2011.02.021
Obor Fyzika pevných látek a magnetismus
Klíčová slova Diamond-like carbon; Amorphous hydrogenated carbon; Optical properties; Band structure
Popis The optical properties and structure of a-C:H films were modified by addition of nitrogen into the CH4/H2 deposition mixture. Three films prepared in capacitively coupled rf discharge were compared: (a) hydrogenated diamond like carbon film with hydrogen content of 34 % and indentation hardness of 21.7 GPa, (b) hard a-C:H:N film with nitrogen content of 13 % and indentation hardness of 18.5 GPa and (c) soft a-C:H:N film with nitrogen content of 10 % and indentation hardness of 6.7 GPa. It is shown how the parametrized density of states model describing dielectric response of electronic interband transitions can be applied to modified a-C:H:N and how it can be combined with correct treatment of transmittance measured in infrared range using additional Gaussian peaks in joint density of phonon states. This analysis resulted in determination of film dielectric function in wide spectral range (0.045-30 eV) and provided also information about the density of states of valence and conduction bands and lattice vibrations.
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