Effect of nitrogen incorporation on mechanical properties of DLC coatings on metallic substrates
| Autoři | |
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| Rok publikování | 2010 |
| Druh | Konferenční abstrakty |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | Diamond-like carbon (DLC) and hydrogenated amorphous carbon (a-C:H) films has grown enormously due to their particular and useful properties such as their wide band gaps, high thermal conductivities, high hardness and low friction coefficient. However, there are some technical difficulties in their preparation especially on metallic substrates, where the adhesion is poor. Diamond-like carbon (amorphous hydrogenated carbon: a-C:H) films doped with different amount of nitrogen were deposited by plasma enhanced chemical vapor deposition (PECVD) using capacitively coupled rf discharge (13.56 or 27.12 MHz) in the mixture of CH4/H2/N2 on silicon, glass and metallic substrates. The pressure was maintained below 20 Pa. DC self-bias and gas feed composition parameters were used for modification of the mechanical properties, adhesion to different substrates, chemical composition and structure of the deposited films. Nitrogen content allowed deposition of hard films also on metallic substrates such as stainless steel and aluminum, which are known for poor adhesion on pure DLC films. Mechanical properties of the deposited films were investigated by depth sensing indentation technique. Their structure was studied by optical methods in spectral range from UV to IR. Chemical composition was determined by Rutherford Backscattering Spectroscopy (RBS) combined with Elastic Recoil Detection Analysis (ERDA). From these we could evaluate the percentage of hydrogen from the deposited films. Adhesion to these substrates and mechanical properties of the coatings was optimized by the preparation of multilayer-structures involving TiN and different a-C:H:N films. Acknowledgement: This research has been supported by Ministry of Education, under project MSM 0021622411, Grant agency GACR No. 104/09/H080 and GACR No. 202/07/1669. |
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