Reduction of ATP precursors in capacvitive RF discharge plasma reactor
Autoři | |
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Rok publikování | 2000 |
Druh | Článek ve sborníku |
Konference | 14th International Congress, CHISA 2000, Prague, August 2000 |
Fakulta / Pracoviště MU | |
Citace | |
Obor | Fyzika plazmatu a výboje v plynech |
Klíčová slova | reduction; tungsten trioxide; ammoniumparatungstate; capacitive coupled; plasma |
Popis | The production of tungsten powder is based on precursors which in the first phase of thermic decomposition pass to tungsten trioxide. The subsequent reduction by hydrogen affects the morphology as well as granulometry of the tungsten produced. The contribution deals with the utilisation of plasmachemical decomposition and the activation of ammoniumparatungstate (APT) products in capacitively excited hydrogen plasma. |
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