Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets

Varování

Publikace nespadá pod Ekonomicko-správní fakultu, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.
Autoři

HNILICA Jaroslav ŠLAPANSKÁ Marta KROKER Michael KLEIN Peter VAŠINA Petr

Rok publikování 2024
Druh Článek v odborném periodiku
Časopis / Zdroj Plasma Sources Science and Technology
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
www https://iopscience.iop.org/article/10.1088/1361-6595/ad546b
Doi http://dx.doi.org/10.1088/1361-6595/ad546b
Klíčová slova HiPIMS; spokes; ionisation zones; OES; magnetron sputtering; floating potential
Popis Investigating spokes in high-power impulse magnetron sputtering discharge requires non-invasive diagnostic methods to characterise accurately spoke properties. A fast photodiode and a cylindrical Langmuir probe were employed to synchronise the moment of acquisition of the optical emission spectrum with the position of a passing spoke. This study provides statistical data analysis to bring insights into spoke characteristics in a non-reactive argon atmosphere, employing aluminium, chromium, copper, titanium, and tungsten targets. Utilising different target materials, the objective is to describe basic parameters such as shape, length, and propagation velocity of spokes and also analyse spoke inner parameters such as floating potential and spectral emission, under nearly identical experimental conditions. From the optical emission, the most prominent species within the spoke were determined. Additionally, the mechanism governing spoke movement was described using a phenomenological model.
Související projekty:

Používáte starou verzi internetového prohlížeče. Doporučujeme aktualizovat Váš prohlížeč na nejnovější verzi.