Deposition of Functional Plasma Polymers Influenced by Reactor Geometry in Capacitively Coupled Discharges

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Publikace nespadá pod Ekonomicko-správní fakultu, ale pod Středoevropský technologický institut. Oficiální stránka publikace je na webu muni.cz.
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HEGEMANN Dirk MICHLÍČEK Miroslav BLANCHARD Noemi E. SCHUTZ Urs LOHMANN Dominik VANDENBOSSCHE Marianne ZAJÍČKOVÁ Lenka DRABIK Martin

Rok publikování 2016
Druh Článek v odborném periodiku
Časopis / Zdroj Plasma processes and polymers
Fakulta / Pracoviště MU

Středoevropský technologický institut

Citace
www http://onlinelibrary.wiley.com/doi/10.1002/ppap.201500078/abstract;jsessionid=786281515922DCBB841ACC7AB907CF9C.f04t01?systemMessage=Pay+per+view+article+purchase%28PPV%29+on+Wiley+Online+Library+will+be+unavailable+on+Saturday+11th+March+from+05%3A00-14%
Doi http://dx.doi.org/10.1002/ppap.201500078
Obor Fyzika plazmatu a výboje v plynech
Klíčová slova plasma polymer; functional groups; ion bombardment; cross-linking; aging
Popis The deposition of functional plasma polymers such as a-C:H:O films is mainly influenced by fragmentation of the parent molecules in the gas phase as well as by the energetic conditions during film growth at the surface. The influence of gas phase and surface processes on the a-C:H:O film properties was thus investigated in order to optimize cross-linking and functional group density. The control of both conditions enables permanent functional plasma polymer films deposited within different reactor geometries (capacitively coupled symmetric vs. asymmetric at driven electrode and at grounded electrode). Comparison and up-scaling of such plasma polymerization processes are facilitated by knowing the internal energy input into the plasma and into the growing film surface.
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