Reactive argon/acetylene HiPIMS discharge – time-resolved diagnostic of present species
| Autoři | |
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| Rok publikování | 2015 |
| Druh | Konferenční abstrakty |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | Temporal evolution of the selected emission line intensities – H line, atom and ion line of Ti and Ar – were measured during the 400us HiPIMS pulse for different acetylene flows. Moreover, densities of sputtered titanium atoms and ions in their ground levels were determined using spectroscopic technique based on effective branching fractions. The technique is based on fitting theoretically calculated branching fractions to experimentally measured fractions of the relative intensities of carefully selected lines of the measured species. Dependencies of intensities of selected species and Ti atom and ion densities on discharge current evolution were studied and were compared for selected acetylene flows. The studied acetylene flow (1-5 sccm) covered the composition of the deposited coatings from titanium rich coating with only a small amount of carbon to carbon rich coating with only a small amount of titanium, whereas the coating with approximately 50% of titanium and 50% of carbon shows generally the highest hardness. |
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