Cathode voltage and discharge current oscillations and spoke behavior during HiPIMS discharge
| Autoři | |
|---|---|
| Rok publikování | 2015 |
| Druh | Další prezentace na konferencích |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | The spokes presence and their behavior were studied by high-speed imaging. The spoke appearance was strongly dependent on the pressure. At very low pressure, the triangular spoke shape was well recognized but with increasing pressure the shape became diffusive. Overreaching 2 Pa there was no spokes recognizable. Camera enables to record two successive images from the same pulse with time delay of 3 µs.Spoke rotation velocity and frequency was derived from the spoke image shift in the pressure range 0.18-0.5 Pa, where the spokes were well distinguished. The spoke characteristic frequency was arbitrary determined as multiplication of number of spokes with rotation frequency and ranges from 77 to 178 kHz. Spoke characteristic frequency is in the same order of magnitude as observed oscillations on cathode voltage and discharge current, nevertheless they are not identical. Spoke characteristic frequency is 3-4 times lower than the frequency of the oscillations. |
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