Impact of neutral gas temperatures on reactive magnetron sputtering
| Authors | |
|---|---|
| Year of publication | 2010 |
| Type | Article in Proceedings |
| Conference | Potential and Applications of Thin Ceramic and Metal Coatings |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | magnetron sputtering; modelling; temperature; hysteresis |
| Description | Temperature is an important parameter which influences whole sputtering process. A model of reactive magnetron sputtering was used to investigate an effect of different temperatures in reactor during reactive sputtering on a hysteresis behaviour of the sputtering. We report shifts of transitions between two modes of a reactive sputtering process. |
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