Impact of neutral gas temperatures on reactive magnetron sputtering

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Authors

SCHMIDTOVÁ Tereza VAŠINA Petr

Year of publication 2010
Type Article in Proceedings
Conference Potential and Applications of Thin Ceramic and Metal Coatings
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords magnetron sputtering; modelling; temperature; hysteresis
Description Temperature is an important parameter which influences whole sputtering process. A model of reactive magnetron sputtering was used to investigate an effect of different temperatures in reactor during reactive sputtering on a hysteresis behaviour of the sputtering. We report shifts of transitions between two modes of a reactive sputtering process.
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