Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process

Vašina,  Petr; Dvořák,  Pavel

Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process

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Authors	VAŠINA Petr DVOŘÁK Pavel
Year of publication	2009
Type	Article in Proceedings
Conference	Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	reactive sputtering
Description	Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process, proceeding
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