Advanced modeling of reactive sputtering process with non-linear discharge current density

Schmidtová,  Tereza; Vašina,  Petr; Eliáš,  Marek

Advanced modeling of reactive sputtering process with non-linear discharge current density

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Authors	SCHMIDTOVÁ Tereza VAŠINA Petr ELIÁŠ Marek
Year of publication	2008
Type	Article in Periodical
Magazine / Source	Chemické Listy
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	reactive magnetron sputtering
Description	Advanced modeling of reactive sputtering process with non-linear discharge current density, paper, interdisciplinary study of plasma physics, magnetron discharges
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