Deposition of polymer films by rf plasma nozle at atmospheric pressure

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Authors

BURŠÍKOVÁ Vilma SLAVÍČEK Pavel BRABLEC Antonín KAPIČKA Vratislav KLÍMA Miloš

Year of publication 2003
Type Article in Proceedings
Conference XV Symposium on Physics of Switching Arc, Vol I, Contributed Papers
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords plasma deposition
Description Deposition of polymer films by 13.56 MHz plasma jet at atmospheric pressure.
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