Diagnostics and monitoring of TiN/AlN deposition process

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Authors	KUDRLE Vít ZAJÍČKOVÁ Lenka BRABLEC Antonín
Year of publication	2001
Type	R&D Presentation
MU Faculty or unit	Faculty of Informatics
Citation
Description	Diagnostics and monitoring of TiN/AlN deposition process
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings Research and development and industrializartion of novel super hard nanocrystalline materials Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates