Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy
| Authors | |
|---|---|
| Year of publication | 2001 |
| Type | Article in Proceedings |
| Conference | WDS'01 Proceedings of Contributed Papers |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | rf plasma; emission sectroscopy; rotational temperature; actinometry |
| Description | Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry. |
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