Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy

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Authors

SUBEDI Deepak Prasad ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma JANČA Jan

Year of publication 2001
Type Article in Proceedings
Conference WDS'01 Proceedings of Contributed Papers
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords rf plasma; emission sectroscopy; rotational temperature; actinometry
Description Low pressure radio-frequency plasma produced in a capacitively coupled planar reactor has been studied by optical emission spectroscopy. Rotational temperature of oxygen molecule has been estimated at pressure 37 Pa and rf power 100-450 W. Concentration of atomic oxygen atom was monitored by actinometry.
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