Strain relaxation and surface morphology of compositionally graded Si/SiGe buffers

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Authors	LI J.H. SPRINGHOLZ G. STANGL G. SEYRINGER H. HOLÝ Václav SCHAFFLER F. BAUER G.
Year of publication	1998
Type	Article in Periodical
Magazine / Source	J. Vac. Sci & Technol.
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Related projects:	Laboratory of thin films and nanostructures