Strain relaxation and surface morphology of compositionally graded Si/SiGe buffers

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Authors

LI J.H. SPRINGHOLZ G. STANGL G. SEYRINGER H. HOLÝ Václav SCHAFFLER F. BAUER G.

Year of publication 1998
Type Article in Periodical
Magazine / Source J. Vac. Sci & Technol.
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
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