Time-resolved sputtered species number density in Ar/N2 HiPIMS

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Authors

BERNÁTOVÁ Katarína KLEIN Peter FEKETE Matej HNILICA Jaroslav VAŠINA Petr

Year of publication 2021
Type Appeared in Conference without Proceedings
MU Faculty or unit

Faculty of Science

Citation
Description The online presentation described the temporal evolution of sputtered titanium atoms and titanium ions ground state densities in the target and substrate region, for four different nitrogen gas flow, and for two differently powered pulses.
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