Diagnostics of reactive magnetron sputtering

Vašina,  Petr; Dvořák,  Pavel; Schmidtová,  Tereza; Buršíková,  Vilma; Žemlička,  Radek

Diagnostics of reactive magnetron sputtering

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Authors	VAŠINA Petr DVOŘÁK Pavel SCHMIDTOVÁ Tereza BURŠÍKOVÁ Vilma ŽEMLIČKA Radek
Year of publication	2010
MU Faculty or unit	Faculty of Science
Citation
Description	Monitoring of reactive magnetron sputtering and thin film deposition/etching by means of higher harmonic frequencies.
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