Modelling of Reactive Magnetron Sputtering with Focus on Changes in Target Utilization

Schmidtová,  Tereza; Vašina,  Petr

Modelling of Reactive Magnetron Sputtering with Focus on Changes in Target Utilization

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Authors	SCHMIDTOVÁ Tereza VAŠINA Petr
Year of publication	2012
Type	Article in Periodical
Magazine / Source	Chemické listy
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	reactive magnetron sputtering; modelling; target utilization
Description	The paper deals with modelling of reactive magnetron sputtering of titanium with focus on changes in target utilization.
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