Project information
Deposition of thin films and surface modifications in silent and glow discharges at atmospheric pressure
- Project Identification
- GA202/02/0880
- Project Period
- 1/2002 - 12/2004
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
- Faculty of Science
The goal of the project is to prove the possibility of uniform plasma treatment of different polymers and deposition of silicon oxides, silicon nitrides and plasma polymers containing silicon in atmospheric pressure glow discharge. Both the filamentary (FDBD) and glow (GDBD) dielectric barrier discharges as well as the conditions of transition between them will be studied for various gas mixtures by electrical measurement, images recording with digital camera and optical emission spectroscopy. The effects of both will be compared as concern the treatment and the deposition. Similar comparison will be made between atmospheric and low pressure glow discharges. The treated surfaces and deposited thin films will be investigated by several characterisation techniques.
Publications
Total number of publications: 34
2002
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ATMOSPHERIC PRESSURE DIFFUSE COPLANAR SURFACE DISCHARGE FOR SURFACE TREATMENT
Applied Physics Letters, year: 2002, volume: 2002, edition: 15
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Enhancement of the Material Surface Properties by Plasma Deposition of Thin Films at Atmospheric Pressure
Czech. J. Phys., year: 2002, volume: 2002, edition: 52
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SURFACE MODIFICATION OF NON-FABRICATED POLYPROPYLENE TEXTILE IN LOW-TEMPERATURE PLASMA AT ATMOSPHERIC PRESSURE
Czech. J. Phys., year: 2002, volume: 2002, edition: 52
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SURFACE MODIFICATION OF NON-FABRICATED POLYPROPYLENE TEXTILE IN LOW-TEMPERATURE PLASMA AT ATMOSPHERIC PRESSURE
Proceedings of HAKONE VIII, year: 2002