Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes
| Authors | |
|---|---|
| Year of publication | 2011 |
| Type | Article in Proceedings |
| Conference | Book of Extended Abstracts POTENTIAL AND APPLICATIONS OF THIN CERAMIC AND METAL COATINGS 2011 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | flow measurement; PECVD; Prandtl-Pitot tube; Iron pentacarbonyl |
| Description | In this work we present a method to measure gas flow where conventional mass flow-meters cannot be used. These are the cases when one operates with highly reactive gases, unstable substances or meets other difficulties. We successfully used Prandtl-Pitot tube for measurement of iron pentacarbonyl flow during the process of plasma synthesis of nanoparticles. |
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