Influence of DLC films on higher harmonic frequencies in capacitive discharges

Investor logo

Warning

This publication doesn't include Faculty of Economics and Administration. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

DVOŘÁK Pavel BURŠÍKOVÁ Vilma ŽEMLIČKA Radek HOMOLA Vojtěch

Year of publication 2011
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Influence of creation or destruction of a DLC film on Fourier components of discharge voltage including higher harmonic frequencies is studied. Fourier components react sensitively on the film presence which can be explained as an influence of the coefficient of secondary electron emission on the electron concentration.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.