Oxygen precipitation studied by x-ray diffraction techniques

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Authors

MEDUŇA Mojmír CAHA Ondřej RŮŽIČKA Jiří BERNATOVÁ Silvie SVOBODA Milan BURŠÍK Jiří

Year of publication 2011
Type Article in Periodical
Magazine / Source Solid State Phenomena
MU Faculty or unit

Central European Institute of Technology

Citation
Field Solid matter physics and magnetism
Keywords Czochralski silicon; oxygen precipitates; x-ray Laue diffraction
Description We report on study of oxygen precipitates grown in Czochralski silicon wafers investigated by x-ray diffraction in Bragg reflection geometry and Laue transmission geometry.
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