Homogeneous and heterogeneous nucleation of oxygen in Si-CZ

Investor logo
Investor logo

Warning

This publication doesn't include Faculty of Economics and Administration. It includes Central European Institute of Technology. Official publication website can be found on muni.cz.
Authors

KUBĚNA Josef KUBĚNA Alan CAHA Ondřej MEDUŇA Mojmír

Year of publication 2011
Type Article in Periodical
Magazine / Source Solid State Phenomena
MU Faculty or unit

Central European Institute of Technology

Citation
Field Solid matter physics and magnetism
Keywords Interstitials; Nucleation; Precipitation; Silicon; Vacancies
Description We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.