Homogeneous and heterogeneous nucleation of oxygen in Si-CZ

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Authors	KUBĚNA Josef KUBĚNA Alan CAHA Ondřej MEDUŇA Mojmír
Year of publication	2011
Type	Article in Periodical
Magazine / Source	Solid State Phenomena
MU Faculty or unit	Central European Institute of Technology
Citation
Field	Solid matter physics and magnetism
Keywords	Interstitials; Nucleation; Precipitation; Silicon; Vacancies
Description	We present numerical simulations of nucleation kinetics of vacancies and interstitials during RTA and we study the impact of annealing temperature on bulk micro defect concentration.
Related projects:	Physical and chemical properties of advanced materials and structures Nucleation and growth of oxygen precipitates in silicon CEITEC - Central European Institute of Technology