Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process

Souček,  Pavel; Schmidtová,  Tereza; Zábranský,  Lukáš; Buršíková,  Vilma; Vašina,  Petr; Jílek, Mojmír; El Mel, Abdelaziz; Tessier, Pierre-Yves; Schäfer, Jan; Buršík, Jiří

Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process

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Authors	SOUČEK Pavel SCHMIDTOVÁ Tereza ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma VAŠINA Petr JÍLEK Mojmír EL MEL Abdelaziz TESSIER Pierre-Yves SCHÄFER Jan BURŠÍK Jiří
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Deposition and analyses of hard and thick well adherent nc-TiC/a-C:H coatings prepared by hybrid PVD-PECVD process. Severeal micrometers thick coatings with hardness over 45 GPa and Young's modulus over 400 GPa was reached.
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