ATMOSPHERIC PRESSURE DCSBD PLASMA TREATMENT OF AL SURFACE: STUDY OF SURFACE MORPHOLOGY AND CHEMICAL COMPOSITION
| Authors | |
|---|---|
| Year of publication | 2010 |
| Type | Article in Proceedings |
| Conference | HAKONE XII Contributed paper |
| MU Faculty or unit | |
| Citation | |
| Web | Web-page of conference |
| Field | Plasma physics |
| Keywords | DSCBD; aluminium; atmospheric pressure plasma |
| Description | In this paper we present the results on ambient air plasma cleaning of aluminium surfaces using the Diffuse Coplanar Surface Barrier Discharge (DCSBD). The plasma cleaning effect was proven by means of Attenuated Total Reflectance FTIR spectroscopy. A ToF LDI MS study has shown that the DCSBD plasma treatment modifying upper surface region. The plasma treatment has resulted also in a significant increase in functional OH groups number and in aluminium surface oxidation. The results of AFM measurements have indicate that the DCSBD plasma treatment does not increase the surface roughness. |
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