Vacancies and self-interstitials dynamics in silicon wafers

Investor logo

Warning

This publication doesn't include Faculty of Economics and Administration. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

CAHA Ondřej KUBĚNA Josef KUBĚNA Alan MEDUŇA Mojmír

Year of publication 2009
Type Article in Periodical
Magazine / Source Solid State Phenomena
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Silicon; vacancies; Interstitials; nucleation
Description This work deals mainly with the nucleation of vacancies during RTA concerning various cooling rates and initial states.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.