Vacancies and self-interstitials dynamics in silicon wafers

Warning

This publication doesn't include Faculty of Economics and Administration. It includes Faculty of Science. Official publication website can be found on muni.cz.

Authors	CAHA Ondřej KUBĚNA Josef KUBĚNA Alan MEDUŇA Mojmír
Year of publication	2009
Type	Article in Periodical
Magazine / Source	Solid State Phenomena
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Silicon; vacancies; Interstitials; nucleation
Description	This work deals mainly with the nucleation of vacancies during RTA concerning various cooling rates and initial states.
Related projects:	Physical and chemical properties of advanced materials and structures Nucleation and growth of oxygen precipitates in silicon