Homogenization of CZ Si wafers by Tabula Rasa annealing
| Authors | |
|---|---|
| Year of publication | 2009 |
| Type | Article in Periodical |
| Magazine / Source | Physica B condensed matter |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | Silicon; Infra red; Precipitates |
| Description | The differences in oxygen precipitation, precipitate morphology and evolution of point defects in samples with and without Tabula Rasa applied were studied by experimental techniques such us infrared absorption spectroscopy, transmission electron microscopy, etching techniques and x-ray diffraction. |
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