Optical Characterization of Ultra-Thin Iron and Iron Oxide Films

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Authors	NEČAS David ZAJÍČKOVÁ Lenka FRANTA Daniel SŤAHEL Pavel MIKULÍK Petr MEDUŇA Mojmír VALTR Miroslav
Year of publication	2009
Type	Article in Periodical
Magazine / Source	e-Journal of Surface Science and Nanotechnology
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	iron; iron oxide; thin films; ellipsometry; spectrophotometry; X-ray reflection
Description	Ultra-thin films of 57Fe deposited on silicon substrates and SiOxCyHz support layers and subsequently oxidized in laboratory atmosphere are studied by two optical methods: the combination of UV/VIS/NIR spectroscopic ellipsometry and spectrophotometry, used to find layer thicknesses and optical constants, and X-ray specular reflectometry, used to obtain the electron density depth profile. The results of both methods are compared and found to be in a relatively good agreement.
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