Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry
| Authors | |
|---|---|
| Year of publication | 2009 |
| Type | Article in Periodical |
| Magazine / Source | Diamond and Related Materials |
| MU Faculty or unit | |
| Citation | |
| Web | https://doi.org/10.1016/j.diamond.2008.09.003 |
| Doi | http://dx.doi.org/10.1016/j.diamond.2008.09.003 |
| Field | Plasma physics |
| Keywords | diamond-like carbon films; thickness non-uniformity; material parameters; optical constants |
| Description | In practice many films prepared using various technologies exhibit stronger or slighter area non-uniformity. Diamond-like carbon (DLC) films are also prepared with this non-uniformity sometimes. In this contribution will be shown how to take into account the thickness non-uniformity of the films when their optical characterization is carried out using spectrometric ellipsometry. Two new formulas expressing each of the three associated ellipsometric parameters, i.e. three components of the Stokes vector, of the films exhibiting thickness non-uniformity will be presented for phase modulated ellipsometry. |
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