Comparative Study on Mechanical Properties of DLC Coatings Prepared by Several Different Deposition Techniques

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Authors	STOICA Adrian BURŠÍKOVÁ Vilma VLADOIU Rodica KLAPETEK Petr VALTR Miroslav BURŠÍK Jiří BLAHOVA Olga
Year of publication	2008
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	The main objective of our work is the characterization of a-C and a-C:H thin films and the comparison between the properties of such films deposited using several techniques like low pressure radio frequency plasma enhanced chemical vapor deposition (PECVD), reactive magnetron sputtering, thermionic vacuum arc (TVA) and gaseous TVA. The depositions were made on glass and single crystalline silicon substrates. We focused our attention on the following coating properties: hardness, elastic modulus, fracture toughness, film-substrate adhesion. The mechanical tests were performed using continuous stiffness measurement (CSM), depth sensing indentation (Fisherscope) and dynamic mechanical analysis (DMA-UNHT). The morphology of the film surface before and after indentation tests was examined using scanning electron and atomic force microscopy (SEM, AFM).
Related projects:	Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges