Plasma deposition of doped Diamond-like carbon nano layers. Process modeling and prediction using Artificial Neural Networks

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Authors

HAVEL Josef BURŠÍKOVÁ Vilma JANČA Jan

Year of publication 2007
Type Article in Proceedings
Conference Nanotechnologia analitica
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Artificial Neural Networks;DLC
Description Plasma deposition of doped Diamond-like carbon nano layers. Process modeling and prediction using Artificial Neural Networks
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