Deposition of organic polymers at higher substrate temperatures in atmospheric pressure glow discharge

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Authors	ŠÍRA Martin TRUNEC David SŤAHEL Pavel BURŠÍKOVÁ Vilma FRANTA Daniel
Year of publication	2006
Type	Article in Periodical
Magazine / Source	Czechoslovak Journal of Physics
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Deposition; organic polymers; atmospheric pressure glow discharge
Description	The aim of the present paper was the deposition of organic polymers at higher substrate temperatures in atmospheric pressure glow discharge.
Related projects:	Deposition of thin films in dielectric barrier discharges at atmospheric pressure