Thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition

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Authors

ZŮDA Jaroslav BURŠÍKOVÁ Vilma ČECH Jan SŤAHEL Pavel

Year of publication 2005
Type Article in Proceedings
Conference JUNIORMAT'05
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Thermal stability; diamond like carbon; thin films; plasma enhanced chemical vapor deposition
Description In this work the thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition was studied.
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