Thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition

Zůda,  Jaroslav; Buršíková,  Vilma; Čech,  Jan; Sťahel,  Pavel

Thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition

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Authors	ZŮDA Jaroslav BURŠÍKOVÁ Vilma ČECH Jan SŤAHEL Pavel
Year of publication	2005
Type	Article in Proceedings
Conference	JUNIORMAT'05
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Thermal stability; diamond like carbon; thin films; plasma enhanced chemical vapor deposition
Description	In this work the thermal stability of diamond like carbon thin films prepared using plasma enhanced chemical vapor deposition was studied.
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