Mechanické vlastnosti plazmově deponovaných tenkých vrstev na různých substrátech

• Title in English: Mechanical properties of PCVD thin solid films on various substrates
• Authors: BURŠÍKOVÁ Vilma; SOBOTA Jan; BURŠÍK Jiří; NAVRÁTIL Vladislav
• Year of publication: 2005
• Type: Article in Proceedings
• Conference: 1. Slovensko - Český seminár "Lokálne mechanické vlastnosti"
• MU Faculty or unit: Faculty of Science
• Field: Solid matter physics and magnetism
• Keywords: Thin solid films; microhardness; low temperature plasma
• Description: Mechanical properties of plasma deposited thin films on different substrates were investigated by mens of Depth Sensing Indentation method. The dependence on various parameters and temperature was studied.

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