Infrared Absorption Spectroscopy of Oxygen Precipitates in Czochralski Silicon
| Authors | |
|---|---|
| Year of publication | 2004 |
| Type | Article in Proceedings |
| Conference | WDS'04 Proceedings of Contributed Papers |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | Infrared; Silicon; Oxygen; Precipitates |
| Description | We have analysed infrared transmittance spectra of Czochralski silicon. Using measurements at liquid nitrogen temperature we have identified the contribution of oxygen precipitates. The continuum theory of average dielectric constant has been used to determine the shape and volume fraction of these particles. |
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