Energy Spectra of Ions in the Hydrogen Capacitively Coupled Low-Pressure Discharge

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Authors

DVOŘÁK Pavel JÁNSKÝ Jaroslav ZAJÍČKOVÁ Lenka JANČA Jan

Year of publication 2005
Type Article in Proceedings
Conference SAPP XV - Book of contributed papers
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords IEDF hydrogen capacitive plasma low-pressure
Description The IEDFs of ions flowing from hydrogen asymmetric capacitively coupled low-pressure discharge were measured. The dependencies of their shapes and integrals on the measurement position are presented.
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