Deposition of Hard carbon films and Its Diagnostics
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Proceedings of the XIVth SAPP |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | Diamond; microwave plasma CVD |
| Description | We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapour deposition (MPCVD). The pre-treatment was varied and its effect on diamond film was studied. |
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