Deposition of polymer films in diffuse coplanar surface discharge

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Authors

ŠIMOR Marcel SŤAHEL Pavel BRABLEC Antonín NAVRÁTIL Zdeněk KOVÁČIK Dušan ZÁHORANOVÁ Anna BURŠÍKOVÁ Vilma ČERNÁK Mirko

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of 16th ISPC
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Deposition; polymer films;coplanar discharge
Description Deposition of polymer films in diffuse coplanar surface discharge
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