Study of Mechanical Properties of Nanostructured Multilayer NbN/C-N Coatings Prepared by Reactive Sputtering
| Authors | |
|---|---|
| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Proceedings of SAPP XIV |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | mechanical properties; nanostructured multilayer coatings; reactive sputtering |
| Description | A complex analysis of the identation response of thin film - substrate systems measured by depth sensing indentation method was done. The effects of the mechanical properties of the substrate on the effective hardness were studied for several different substrates and the existing theoretial models for substrate influance were tested. |
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