Utilization of atmospheric pressure glow discharge for the deposition of thin polymer films

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Authors

NAVRÁTIL Zdeněk SŤAHEL Pavel ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma ČECH Jan KUČEROVÁ Zuzana TRUNEC David

Year of publication 2003
Type Article in Proceedings
Conference WDS'03 Proceedings of Contributed Papers: Part II - Physics of Plasmas and Ionized Media
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords atmospheric pressure glow dicharge; spectroscopy; nitrogen; organosilicon
Description Utilization of atmospheric pressure glow discharge for the deposition of thin polymer films
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