Temperature Diagnostic of Polycarbonate Samples Treated in RF Capacitive Argon Plasma
| Authors | |
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| Year of publication | 2003 |
| Type | Article in Proceedings |
| Conference | Proceedings XXVI ICPIG, Greifswald |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | plasma diagnostics; plasma surface teratment; polycarbonate; capacitive RF argon plasma |
| Description | polycarbonate samples were treated in low pressure capacitive coupled RF argon plasma. The surface temperature was continuously measured during plasma teratment. The contact angle and surface enrgies were determined in dependence on sample surface temperature. |
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