Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors

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Authors

ELIÁŠ Marek ŽÍLA Jaromír JANČA Jan BROŽEK Vlastimil

Year of publication 2002
Type Article in Periodical
Magazine / Source Czech. Jourmal of Physics
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords tungsten; titaniun; plasma; ICP
Description Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors
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