Plasmachemical nitridation of boron precursors

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Authors	ELIÁŠ Marek KUDRLE Vít JANČA Jan BROŽEK Vlastimil
Year of publication	2002
Type	Article in Periodical
Magazine / Source	Czech. J. Phys.
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	boron nitride; plasma chemistry
Attached files	206_1.pdf sppt2002.zip
Description	We carried out the plasmachemical nitridation of boron precursors
Related projects:	Study of plasmachemical processes using microwave and optical spectroscopy Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates