Stanovení povrchové energie tenkých vrstev nanášených v plazmatu vysokofrekvenčního výboje

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Title in English Determination of Surface Energy of Plasma Deposited Thin Films
Authors

PRYČKOVÁ Jana SUBEDI Deepak Prasad BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka BRZOBOHATÝ Oto

Year of publication 2001
Type Article in Proceedings
Conference JUNIORMAT 01
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Contact angle measurement; surface energy; microhardness; PECVD; Diamond-like carbon
Description The aim of the present work is to characterise plasma deposited silicon containing diamond-ĺike films (DLC) by two experimental methods: by means of the commercial device equipped with CCD camera and by the method using a laser beam for the contact angle measurement. We found out, that addition of hexamethyldisiloxane into the gas mixture for DLC film deposition gives the possibility to modify the the wetting, sticking and mechanical properties of DLC films.
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