Deposition of polymer films in rf discharge at atmospheric pressure
Authors | |
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Year of publication | 2001 |
Type | Article in Proceedings |
Conference | 15th ISPC symposium proceedings, vol VI |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | plasma; plasma pencil; discharge |
Description | Deposition of polymer films in rf discharge at atmospheric pressure |
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