Deposition of polymer films in rf discharge at atmospheric pressure

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Authors

BRABLEC Antonín SLAVÍČEK Pavel KAPIČKA Vratislav KLÍMA Miloš ELIÁŠ Marek ŠÍCHA Miloš SLAVINSKÁ D. TRCHOVÁ M. BIEDERMAN H.

Year of publication 2001
Type Article in Proceedings
Conference 15th ISPC symposium proceedings, vol VI
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords plasma; plasma pencil; discharge
Description Deposition of polymer films in rf discharge at atmospheric pressure
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