Preparation of enhanced CN-based hard coatings by PECVD

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Authors

ELIÁŠ Marek ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma KUDRLE Vít KLAPETEK Petr JANČA Jan

Year of publication 2001
Type Article in Proceedings
Conference Proceedings of 15th International Symposium on Plasma Chemistry
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Attached files
Description Preparation of enhanced CN-based hard coatings by PECVD
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