Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

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Authors

MIKULÍK Petr JERGEL M. BAUMBACH T. MAJKOVÁ E. PINČÍK E. LUBY Š. ORTEGA L. TUCOULOU R. HUDEK P. KOSTIČ I.

Year of publication 2001
Type Article in Periodical
Magazine / Source J. Phys. D: Appl. Phys.
MU Faculty or unit

Faculty of Science

Citation
Web http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001
Field Solid matter physics and magnetism
Keywords reflectivity; xrr; x-uv optics; gratings; w/si; x-ray
Description Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.
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