In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction

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Authors

ZHUANG Y. PIETSCH U. STANGL J. HOLÝ Václav DAROWSKI N. GRENZER J. ZERLAUTH S. SCHÄFFLER F. BAUER G.

Year of publication 2000
Type Article in Periodical
Magazine / Source Physica B
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
Description In-plane strain and shape analysis of Si/SiGe nanostructures by grazing incidence diffraction
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